Mems accelerometer performance solution
Linearity
linearity is mainly to make the accelerometer have a better linear output, that is, the voltage value (analog or digital) output by the MEMS chip is proportional to the acceleration value received by the chip. In fact, non-linear factors are inevitable, such as the design of springs, the design of damping systems, the design of variable capacitance structures, and the collection of signals, etc. will produce some non-linear effects. The key technology of MEMS accelerometer is to reduce these nonlinear effects to an acceptable level. Choosing the appropriate mechanical structure design, or researching and developing some new mechanical structures and circuit structures, to make the actual device model closer to the theoretical model will greatly improve the linearity of the device. In addition, improving the production process of the chip also plays an important role in improving the linearity of the chip.
Sensitivity and power consumption
affect the sensitivity of the chip depends on the structure of the chip and the noise generated by itself. For the X-axis accelerometer, the kneading degree of the X-axis must be large (small stiffness, easy to deform), and the kneading degree of the Y-axis and Z-axis must be small (large stiffness, not easy to deform) to ensure the deformation of the Y-axis and Z-axis It will not affect the displacement response of the small acceleration to the X axis. This must be improved and optimized from the mechanical structure design and chip processing technology. The improvement of noise is a factor determined by the level of technology. Power consumption is an important factor that affects the application range of the chip. To market the MEMS chip, the MEMS acceleration chip should enter the handheld device. Therefore, the power consumption of the chip must be reduced.
