MEMS accelerometer concept
accelerometer is an inertial sensor, can measure acceleration forces of the object. When the accelerating force is subjected to a force during the acceleration of an object, such as on gravity.
Acceleration force can be a constant such as mg may be variable. As a result of micro-electromechanical systems technology, which greatly reduced size can be used in various fields of life, industrial, military, aerospace, etc., because MEMS accelerometer has a small size, light weight, and low power consumption so that more applications in all walks of life.
Qingdao Teng-chi mems accelerometers
how MEMS accelerometer works?
Mature MEMS accelerometer technology into three types: piezoelectric, capacitance sensing type, thermal type. Using piezoelectric MEMS accelerometer is a piezoelectric effect, a rigid support inside the mass, the mass will produce pressure sports case, strain rigid body, the acceleration converted to an electrical signal output. Interior volume sensing MEMS accelerometer of formula there is also a mass, from the point of view of a single unit, it is standard plate capacitor. Change in movement acceleration of the movable mass driven thereby changing the capacitance of the bipolar plate spacing and alignment area, calculated by measuring the capacitance change amount of acceleration. Internal thermal type MEMS accelerometer has no mass, its center has a heating body, surrounded by a temperature sensor, which is sealed gas chamber, under the action when operating in the heating body, the gas to form a warm air inside the hot gas and the proportion of cold air around the groups are different, changes in the thermal field is formed by the warm air so that movement of the inertial sensor senses acceleration. Since the piezoelectric MEMS accelerometer inside presence of rigid support, in general, piezoelectric MEMS accelerometer can sense the "dynamic" acceleration, and not sensitive to the "static" acceleration, is what we call the acceleration of gravity . The heat capacity of a sense of style and sense of style both induction "dynamic" acceleration, but also induction "static" acceleration.
