What types of MEMS accelerometers are there?
MEMS accelerometers are based on integrated circuit technology and micro-machining technology, and integrate electronic and mechanical originals on a single chip. They have a series of advantages such as small size, light weight, low cost, low energy consumption, high integration, etc. The types of accelerometers are mainly as follows:
1. Angular vibration accelerometer, linear vibration accelerometer
2, torsion pendulum accelerometer, cantilever beam accelerometer, spring-supported accelerometer
3, capacitive accelerometer, resistive accelerometer, resonant accelerometer, heat flow accelerometer , Tunnel current accelerometer
4, open-loop accelerometer, closed-loop accelerometer
5, single-axis micromechanical accelerometer, dual-axis micromechanical accelerometer i, three-axis micromechanical accelerometer, of
which sensitive components of capacitive MEMS accelerometer The capacitor between the fixed electrode and the movable electrode is the most widely studied type of acceleration sensor. It generally adopts a cantilever beam, a fixed beam or a flexible shaft structure to support a mass that acts as a capacitive moving plate electrode. The block and a fixed plate constitute a plate capacitor.
Its working principle is that under the action of external acceleration, the displacement of the proof mass will change the capacitance between the mass and the electrode, and the amount of acceleration can be measured by detecting this change with the peripheral circuit.
