DESCRIPTION accelerometer (MEMS accelerometers)
Applications Mesm accelerometer and what are some simple division introduced
Wherein the structural design principles msms accelerometer
1, an isotropic principle: When the silicon microstructures by all impact action direction, only one or several most sensitive direction, the direction of the rest are slow.
2, the sensitivity of the design principles: line design is the sensitivity of the silicon microstructure displacement space micro-nano order to reflect the change in acceleration, and the measurement result related to the effective electrical quantity (capacity), it has the same good sensitivity .
