Classification Overview Mems sensor
MEMS sensors described: MEMS stands for micro-electromechanical systems MEMS.
Mass production will be the micro-mechanism, micro-sensors, micro-actuators, and signal processing and control circuits, until the interface, communication and power is one of the micro devices or systems.
It may be appreciated that utilizing the conventional semiconductor processes and materials, with a micromechanical micron technology on a chip, and the corresponding integrated circuit technology as a whole. It is based on semiconductor manufacturing technology developed on the basis of an advanced manufacturing technology platform.
Mems sensor advantages: Compared with traditional mechanical their smaller size, the maximum is not more than one centimeter, or even just a few microns, the thickness is even more minute. Use of silicon-based materials, good electrical properties, the strength of the silicone material, the hardness and Young's modulus and fairly iron, aluminum and similar density, thermal conductivity close to the molybdenum and tungsten. Using integrated circuit (IC) generating a similar technique, the IC can be mass produced in mature technology, technology, high-volume, low-cost production, so that cost-effective relative to conventional "mechanical" substantial increase in manufacturing technology.
MEMS sensors classification:
type MEMS sensor range, many classification methods
below according to works are classified as follows:
