Mems accelerometer for accurate temperature measurements
Mems theoretically accelerometer can measure less than 1 ° inclination, but at a temperature and vibration conditions is still possible to realize a measurement accuracy?
Question is always clear inclination precision value is difficult to answer, because of the need in terms of performance of the MEMS sensor many consider environmental factors. Typically, consumer difficult accelerometer detects a tilt in a dynamic environment is less than 1 °. To demonstrate this, we will generic consumer accelerometer and a new generation of low noise, low drift, and low-power MEMS accelerometer for comparison.
This comparison looks at a number of sources of error inclined present application, and which can compensate for or eliminate the error. 0g precision bias can be observed, 0g offset drift caused by welding, PCB 0g offset drift caused by the alignment of the housing, 0g bias temperature coefficient, the temperature coefficient of sensitivity and accuracy, and the horizontal axis nonlinearity error sensitivity, and these errors can be reduced by fitting the calibration procedure. Lag, during the life of the bias drift 0g, during the life of the sensitivity drift due to moisture and temperature drift 0g change over time due to bending and twisting PCB, etc., which can not be resolved by calibration error terms or other means, need a certain degree of in-situ repair can be reduced.
In this comparison, it is assumed axis sensitivity, nonlinearity and sensitivity compensated, as compared to the temperature coefficient of the offset drift and vibration correction required to minimize these errors much less effort.
