Mems types of capacitive accelerometer (c)
With the development of science and technology from the original accelerometer large size gradually toward miniaturization can be applied in all walks of life and a higher level in terms of performance, to people's lives, science and technology, housing line greatly improves the efficiency and security.
Mems accelerometers divided into six categories
capacitive accelerometer
piezoresistive accelerometer
piezoelectric accelerometer
resonant accelerometer
tunneling accelerometer
thermal convection accelerometer
Wherein capacitive accelerometer structure can be divided into three types of structures:
1, the rocker pendulous accelerometer
2, comb-type silicon micromachined accelerometers
3, pendulous capacitive accelerometer sandwich
Rocker pendulous capacitive accelerometer, also known as torsion silicon micro accelerometer mass because it is sensitive about the shape of the elastic torsional rocker named. It is a typical representative of the United States in 1990 and the lab developed micromechanical accelerometer form a differential capacitance between the detection sensitivity and the quality of the underlying glass substrate, since the mass of the two pieces are positioned side torque receiving beam mass moment of inertia and is not equal, when there is input perpendicular to the accelerometer mass of mass of the sheet so that the rotation about the support beam corresponding to a pair of differential capacitive see a small increase in measured capacitance values of the differential input is obtained along the sensitive axis acceleration.
