Mems types of capacitive accelerometer (a)
With the development of science and technology from the original accelerometer large size gradually toward miniaturization can be applied in all walks of life and a higher level in terms of performance, to people's lives, science and technology, housing line greatly improves the efficiency and security.
Mems accelerometers divided into six categories
capacitive accelerometer
piezoresistive accelerometer
piezoelectric accelerometer
resonant accelerometer
tunneling accelerometer
thermal convection accelerometer
Wherein capacitive accelerometer structure can be divided into three types of structures:
1, the rocker pendulous accelerometer
2, comb-type silicon micromachined accelerometers
3, sandwich pendulous capacitive accelerometer
which sandwich the capacitive pendulous accelerometer known as silicon micromachined cantilever accelerometer is micromachined accelerometer a sandwich structure, since the electrode plate is sandwiched between the fixed plate shape sandwich named. The structure is relatively simple, the method is made of two vertical plane by an intermediate movable plate capacitive sensitive silicon mass balance sheet plated with corresponding fixed plate to form a set of differential capacitive magnitude of the acceleration-sensitive input. When the acceleration of the mass up and down movement by hand, the capacitance change with the pitch differential capacitance change magnitude, theoretical analysis and found that the size differential capacitance formed almost linearly proportional to the acceleration is small in the displacement of the mass.
