go atlas
mesh width=180
x.m l=0 s=0.25
x.m l=40 s=0.25
y.m l=0 s=0.05
y.m l=0.02 s=0.05
y.m l=0.03 s=0.05
region num=1 material=igzo y.min=0 y.max=0.02
region num=2 material=al2o3 y.min=0.02 y.max=0.03
elec num=1 name=gate bottom
elec num=2 name=source y.max=0.0 x.min=0.0 x.max=5.0
elec num=3 name=drain y.max=0.0 x.min=35.0 x.max=40.0
contact num=1 n.poly
contact num=2 workf=4.28
contact num=3 workf=4.28
models fermi
defects nta=1.55e20 ntd=1.55e20 wta=0.013 wtd=0.12 \
nga=0.0 ngd=6.5e16 egd=2.9 wgd=0.1 \
sigtae=1e-15 sigtah=1e-15 sigtde=1e-15 sigtdh=1e-15 \
siggae=1e-15 siggah=1e-15 siggde=1e-15 siggdh=1e-15 \
dfile=base0_don.dat afile=base0_acc.dat numa=128 numd=64
solve init
solve prev
solve vdrain=0.1
save outf=base0_0.str
log outf=base0_1a.log
solve vgate=0 vstep=-0.1 vfinal=-5 name=gate
log off
load inf=base0_0.str master
solve prev
log outf=base0_1b.log
solve vstep=0.2 vfinal=20.0 name=gate
tonyplot -overlay base0_1a.log base0_1b.log -set tftex10_1.set
quit
常见IGZO仿真,接触是金属铝(workfunction=4.28),绝缘层采用的是氧化铝
下面是tftex10_1.set的代码
# TPCS version: 8 # various properties log label 0 key opaque 0 mark frequency 0 mark overlay 0 graph width 0 1 graph width 1 1 graph width 2 1 graph width 3 1 graph width 4 4 graph width 5 1 sequence size 2 sequence width 2 log zero 0 sequence mark 0 0 sequence mark 1 1 sequence mark 2 2 sequence mark 3 3 sequence mark 4 4 sequence mark 5 5 # Functions function 1 "" "" function 2 "" "" function 3 "" "" function 4 "" "" select 1 # xygraph flags show points on show lines on # xygraph types xygraph type 0 convert 0 xygraph yaxis scale linear # xygraph x-axis xygraph xaxis "Gate Voltage" linear # xygraph y-axes xygraph yaxis none xygraph yaxis "Drain Current" linear # xygraph group xygraph group "(unknown electricals)" # key positions key contours 1 at 3 key contours 2 at 1 key contours 3 at 6 key electrical at 6 key vectors at 6 key overlay at 2 key regions at 4 key apply # annotation, titles title main "ATLAS simulation of amorphous IGZO TFT" title sub "Comparison between simulation and experiment" # annotation, footers footer right none footer left none # annotation, show show xaxis on show yaxis on show grid off show label xaxis on show label yaxis on # annotation, axes range xaxis auto range yaxis auto label xaxis "Gate Voltage (V)" label yaxis "Drain Current (A)" # zoom zoom from 0, 0 scale 1, 1 # user labels # overlay level names label overlay 0 "simulation" label overlay 1 "experiment"
输出图形为
将图形转化为log
将前半部分放大后观察
下面是输出特性曲线
go atlas mesh width=180 x.m l=0 s=0.25 x.m l=40 s=0.25 y.m l=0 s=0.05 y.m l=0.02 s=0.05 y.m l=0.03 s=0.05 region num=1 material=igzo y.min=0 y.max=0.02 region num=2 material=al2o3 y.min=0.02 y.max=0.03 elec num=1 name=gate bottom elec num=2 name=source y.max=0.0 x.min=0.0 x.max=5.0 elec num=3 name=drain y.max=0.0 x.min=35.0 x.max=40.0 contact num=1 n.poly contact num=2 workf=4.28 contact num=3 workf=4.28 models fermi defects nta=1.55e20 ntd=1.55e20 wta=0.013 wtd=0.12 \ nga=0.0 ngd=6.5e16 egd=2.9 wgd=0.1 \ sigtae=1e-15 sigtah=1e-15 sigtde=1e-15 sigtdh=1e-15 \ siggae=1e-15 siggah=1e-15 siggde=1e-15 siggdh=1e-15 \ dfile=don afile=acc numa=128 numd=64 solve solve vstep=0.2 vfinal=4.0 name=gate save outf=base0_2.str solve vstep=0.2 vfinal=8.0 name=gate save outf=base0_3.str solve vstep=0.2 vfinal=12.0 name=gate save outf=base0_4.str solve vstep=0.2 vfinal=16.0 name=gate save outf=base0_5.str solve vstep=0.2 vfinal=20.0 name=gate save outf=base0_6.str load inf=base0_2.str master log outf=base0_2.log solve vdrain=0.0 vstep=0.5 vfinal=20.0 name=drain load inf=base0_3.str master log outf=base0_3.log solve vdrain=0.0 vstep=0.5 vfinal=20.0 name=drain load inf=base0_4.str master log outf=base0_4.log solve vdrain=0.0 vstep=0.5 vfinal=20.0 name=drain load inf=base0_5.str master log outf=base0_5.log solve vdrain=0.0 vstep=0.5 vfinal=20.0 name=drain load inf=base0_6.str master log outf=base0_6.log solve vdrain=0.0 vstep=0.5 vfinal=20.0 name=drain tonyplot -overlay base0_2.log base0_3.log base0_4.log base0_5.log base0_6.log -set tftex10_2.set quit