SEMI SECS / GEM standard Overview
SECS / GEM is a member of the International Semiconductor Equipment and Materials Association (the SEMI) constructed in connection with the standard.
The standard applied between the device and the plant MES, CIM and other control systems to establish communication.
SECS / GEM SEMI is the semiconductor equipment communication standard
Generally, SECS / GEM standard defines the information, and a state machine context, selectivity achieved with the plant equipment to allow software to control and monitor the plant manufacturing equipment.
achieve
GEM provides a framework for factory automation, monitoring and control from a remote host device. Allow from different vendors provided
apparatus in the automated manufacturing facility.
GEM standard defines a set of basic requirements GEM GEM and an additional set of functions. It requires each GEM GEM
interface contains a specific element. However, it encourages each interface has a unique machine-specific elements.
Within the factory using SECS / GEM standards, and the presence of both the host device. Implementation and compliance with SEMI standard operating software by the device side. Manufacturer (plant) to build and host software to establish communication device interface, thus achieving control of plant equipment.
Host achieve selective communication standard, because it only set the expected behavior of the device. If you want to use the interface and functions, host and device must achieve specific and clear function and behavior.
communication
SECS / GEM SEMI connectivity standard defines how the host and the device begins to establish communications, and also defines the way when the communication is interrupted to re-establish communications. Online identification method is responsible for verifying hardware and software to identify the device. Terminal services allow the host operator and equipment operators exchange of text entered manually at the console.
control
SECS / GEM SEMI standard connection control state model summarizes the level of cooperation between the host and the device operator. Host device offers three basic level of control: offline, online / local, and online / remote, to determine the ability of the host to control and monitor equipment. Equipment operators set the level of host control. Remote control function allows the host to send such as "start", "stop", "pause," "continue" and "break" such instructions for work process control equipment.
Notification operation
Collects events and alerts so that the host can monitor the operation of the equipment. Equipment collects event will feature important to normal activities and abnormal events to notify the host. When potentially hazardous activities occur and subsequently cleared, alert feature notifies the host device. Which collects events and alerts the host settings need to be notified. SECS / GEM standard connectivity requirements of a particular event must have notice, but generally will define additional equipment to allow them to monitor specific host device related activities.
Event Report
The host device may be configured to automatically send data in the report when a status. This powerful data collection methods to collect more data.
Process management program
Handler provides a method for transmitting management processing program between the host and device. The host can also query the program is a list of available programs and the removal process.
Device control and configuration
GEM allows the host to control and configure the machine.
Remote command
Each GEM interface defines a set of remote commands. The machine can also implement custom command.
Equipment constant
Each GEM interface defines a set of constants required GEM. You can configure the device constants device software and hardware behavior.
Period of realization
// 报警设置
public void AlarmSet(int ALID, bool bSet)
{
// eq_alarm_set, ALID, set
string cmd = "";
CListOperate.listAppend(ref cmd, ALID.ToString(), bSet ? "1" : "0");
m_pImpl.toolCmd(cmd);
}
// Get a list of alarm
public List <AlarmInfo> AlarmGetList ()
{
// eq_alarm_get_list
// alid, ALTX, the Enable, the Set
string cmd = "";
RcResult reply;
reply = m_pImpl.toolCmdReply(cmd);
// 解析
List<AlarmInfo> listInfo = new List<AlarmInfo>();
if (reply.rc == 0 && reply.result != null)
{
string[] listAlarm = null;
string[] element = null;
CListOperate.listSplit(reply.result, ref listAlarm);
for (int i = 0; i < listAlarm.Length; i++ )
{
CListOperate.listSplit(listAlarm[i], ref element);
if (element != null && element.Length > 3)
{
AlarmInfo info = new AlarmInfo();
info.ALID = element[0];
info.ALTX = element[1];
info.bEnable = element[2]=="1"?true:false;
info.bSet = element[3] == "1" ? true : false;
listInfo.Add(info);
}
}
}
return listInfo;
}