First, the glass substrate was washed
Selection of the glass substrate with a diameter of 3 inches is generally circular glass plate, usually made of ordinary glass and quartz glass type 2, the former having a thickness of 0.5mm, the latter having a thickness of 0.8mm, so as to distinguish
1. Prepare a large, medium and small petri dishes, two flask, a glass rod, which is formulated in the largest piranha water; inside the plasma discharge to water, which put a small ethanol
2. with rubber gloves and disposable masks, petri dish, flask, water with a glass rod at the hood rinsed again, and then rinsed with deionized water, blown dry with nitrogen and finally take
3. The glass substrate is removed from the package, placed in a Petri dish with tweezers (scattered place, to avoid bare hands)
4. pick concentrated sulfuric acid and hydrogen peroxide, in a hood according to a ratio of about 2: 1 formulated
The flask first by hydrogen peroxide to measure the amount of concentrated sulfuric acid, poured into a petri dish containing glass sheet, half concentrated and then taken by the amount of sulfuric acid in an amount of another flask, poured into a petri dish containing glass sheet , reacts with concentrated sulfuric acid, pull down the shutter window fume hood, stirring with a glass rod (MUST formulated in a fume hood, preparation of hydrogen peroxide sure to pour concentrated sulfuric acid, typically 50ml 25ml of concentrated sulfuric acid hydrogen peroxide)
6. soak for 10 minutes
7. Add deionized water No. dish (about half volume)
8. picked up with tweezers in the glass cleaning solution, rinsed in a fume hood, the angle is about 60 degrees, a small stream of water, as much as possible to lower the glass tight against splashed ventilated table; to the surface to be cleaned without cleaning fluid residues before being placed in deionized water (commonly two tweezers, taking note of the washing water and the angle of the glass sheet, the gripping forceps cleaning attention at)
9. After the end of the washing sequence, the petri dish containing glass sheet medium into ultrasonic cleaner, washing machine water dish about 1/3 of the height, to avoid the washing water into the dish
10. A washing machine to open the switch, the power regulator 90 (far right), 4min time (power on the left)
11. After washing, ethanol was placed into small Petri dishes, glass was immersed to make capacity
12. The petri dish containing glass ethanol in an ultrasonic cleaning machine, with step 9,10
13. During cleaning, the waste liquid is poured into the waste container, and used dishes washed, to be flushed out with nitrogen dry residue; waste container is placed in a fume hood opening, to be completed before the experiment sealing keep good;
14. After the end of washing, the plates were removed, picked up with tweezers glass, blown dry with nitrogen (as not facing the front glass outlet should be blown directly along the front direction) to the small amount of liquid droplets to be dried when the residual, stuck by hand direct drying glass sheets, and finally into the storage box;
15. After drying sequentially, glass sheet installed, the dish ethanol, deionized water directly into the tank, rinse off residual liquid, washing flask, washing the glass rod, and then blown dry with nitrogen
16. The laboratory supplies all into place, finished cleaning the glass bottles to take away the waste bottle sealed storage.
17. The disposable mask garbage, rubber gloves, air-laid paper or the like generated throw away the trash
Second, the coating film PI
Third, paste mask
Select the substrate
1. PI film coating on a glass substrate
2. PI labeled with a marker pen positive resist process parameters - speed, thickness
3. The rear glass plate of PI film
Affixed pellicle
1. Good pre-drawn two-dimensional map stored in a format dxf
2. Reduction of the appropriate size, and attach it to the printing paper, with a hard object pressed cement
3. Press the back of the printer wrench, lift the roller, into the paper, lift the wrench
4. Power, open interface, the import file
The layout, cutting parameters set, the intensity of the cutting attention to 6-7
6. Start cutting
7. The pellicle is affixed to the cut sides of the glass substrate, the side writing a tag attached to a film, paste just cut film PI film side
8. The prepared test piece placed in petri dishes and labeled.
Fourth, the magneto-sputtering
Between West magnetron sputtering purification steps